ASML Wafer Handler Robot – Repair / Refurbish Service

SMG Technology provides full technical repair & overhaul service Our company developed own condition monitoring system based on number of robot repair experiences (using for all robot repair & test).

ASML Wafer Handler Robot

SMG Technology provides perfect overhaul service with the self-developed test kit and wide experience on robotics and core drivers.

ASML AWH Robot

Type on the AWH Robot

MK1,2. ---> Double Fold
MK3 ---> SCARA Fold

1. Outline:

A. Overview

1. Find the required Pre - align on position
2. Find the required stage on position
3. Transfer Handling on Position

ASML AWH Robot Over view

2. Robot Repair Level:

A. Working Levels

◆ SMG providing full technical repair & overhaul service
◆ SMG developed own condition monitoring system based on number of robot repair experiences (using for all robot repair & test)

3. SMG Robot Repair Process

All repair following our standard repair process steps to make sure 100% quality.
Incoming Inspection Report will be provided within 3 days from incoming date
If there is any specific event during repair process, SMG team will officially report without delay

4. ASML Wafer Handler Robot Repair Item

A. Detail of lay-out

B. Detail of lay-out in the R1,R2 Body

B. Detail of lay-out in the Z - Body

B. Detail of lay-out in the Fold & SCARA Body

5. SMG Robot Inspection and Test Kit

◈ OPTI-VA & LODIA is a condition monitoring system
◈ SMG developed own S/W based on our technical experience
◈ We doing test to see overall condition for every robot repair

◆ Terms and Conditions:
1. Delivery terms: 6~8 weeks after PO & product incoming date
2. Payment terms: T/T 30 days after delivery
3. Warranty: 6 month after installation date for repair
4. Validity: 2 years from quotation date

Informations

ASML Wafer Handler Robot – Repair / Refurbish Service