AXCELIS Wafer Handling ROBOT – Repair / Refurbish Service

SMG Technology provides full technical repair & overhaul service Our company developed own condition monitoring system based on number of robot repair experiences (using for all robot repair & test).
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AXCELIS Wafer Handling Robot

We are pleased to offer a comprehensive refurbishment and repair service for Axcelis Wafer Handling robots.

Our service includes a full diagnostic assessment, precision repair, and meticulous refurbishment, ensuring your robot is returned to peak operational efficiency.

Our team of highly skilled technicians, with extensive experience in Axcelis systems, is equipped to handle every aspect of the process.

We utilize only original, certified spare parts and cutting-edge tools to perform the overhaul, which not only restores but often enhances the robot's performance and reliability. Before we provide our Statement of Work (SOW) and a detailed quotation, rest assured that we conduct thorough testing post-repair.

Our advanced testing protocols include functional verification, stress testing, and performance calibration, ensuring that your robot meets or exceeds all original specifications.

We also perform a final quality inspection to confirm that the robot is fully operational and safe for use. Upon completion, you will receive a comprehensive service report that outlines the work performed, including detailed diagnostic findings, parts replaced, and calibration results.

In addition, we provide a testing video that demonstrates the robot operating under real-world conditions, offering transparent proof of its restored functionality.

To further support your operations, we offer optional services such as on-site installation assistance, operator training, and a tailored preventive maintenance plan designed to extend the lifespan of your equipment and minimize the risk of future breakdowns.

2. Robot Repair Level:

A. Working Levels

◆ SMG providing full technical repair & overhaul service
◆ SMG developed own condition monitoring system based on number of robot repair experiences (using for all robot repair & test)

3. SMG Robot Repair Process

All repair following our standard repair process steps to make sure 100% quality.
Incoming Inspection Report will be provided within 3 days from incoming date
If there is any specific event during repair process, SMG team will officially report without delay

4. ASML Wafer Handler Robot Repair Item

A. Detail of lay-out

B. Detail of lay-out

C. Repair items

Robot Test kit - Full operational/Repeatability test

5. SMG Robot Inspection and Test Kit

◈ OPTI-VA & LODIA is a condition monitoring system
◈ SMG developed own S/W based on our technical experience
◈ We doing test to see overall condition for every robot repair
◆ Terms and Conditions:
1. Delivery terms: 6~8 weeks after PO & product incoming date
2. Payment terms: T/T 30 days after delivery
3. Warranty: 6 month after installation date for repair
4. Validity: 2 years from quotation date

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