CMP/CVD/PVD HEAT EXCHANGERS SERIES

Introducing: Liquid to Liquid  
SMG Heat Exchanger Series

Our Heat Exchangers are specifically designed to tackle the challenges of the most critical processes, ensuring optimal performance and maximum reliability.

Designed with precision engineering and advanced technology, this Series offers efficiency, performance, and reliability.

Unparalleled control, monitoring, and error management capabilities all fully customizable to suit your specific requirements.
• Precise Flow/Temperature Control 
• No Condensation issues
• Real-Time Buzzer Alerts
• Error Log
• Pump Operation
• Resistivity
• Remote Control
• Total Customization
CMP/CVD/PVD HEAT EXCHANGERS SERIES

Introducing: Liquid to Liquid  
SMG Heat Exchanger Series

Our Heat Exchangers are specifically designed to tackle the challenges of the most critical processes, ensuring optimal performance and maximum reliability.

Designed with precision engineering and advanced technology, this Series offers efficiency, performance, and reliability.

Unparalleled control, monitoring, and error management capabilities all fully customizable to suit your specific requirements.
• Precise Flow/Temperature Control 
• No Condensation issues
• Real-Time Buzzer Alerts
• Error Log
• Pump Operation
• Resistivity
• Remote Control
• Total Customization
Advanced Heat Exchanger Series for CMP, CVD, and PVD Applications

Our heat exchangers are specifically engineered to achieve outstanding performance and effectively address process challenges in the most demanding applications. Designed to fully adapt to the various tools used in chemical-mechanical planarization (CMP), chemical vapor deposition (CVD), and physical vapor deposition (PVD), they provide a versatile and highly customizable solution.

Each model is developed to optimize thermal control, enhance operational efficiency, and ensure seamless integration into existing production systems. With our cutting-edge technology, achieving precision, energy efficiency, and compatibility in high-tech environments becomes straightforward, while simultaneously overcoming process-related obstacles with ease.
Perfect Integration, Installation Excellence and Unmatched Support
On-Site Installation
Minimizing disruption to your operations. 
Comprehensive Support
Our team ready to respond promptly and effectively. 
Spare Parts Availability
Quick access to replacements whenever needed.
Wafer Sputtering – Apollo 200 ASMPT
SUCCESS STORIES ACHIEVED ON sputtering processes
SUCCESS STORIES ON sputtering processes

Apollo NEXX

The Heat Exchanger SMG GE-8040 is a state-of-the-art solution designed to optimize thermal management for the Apollo platform by NEXX Systems, used in advanced electroplating and semiconductor packaging processes.

This innovation ensures precise temperature control, enhancing operational efficiency and process quality.

Advanced Thermal Precision: Maintains stable temperatures during critical plating processes, preserving uniformity in metal layers.

Seamless Integration with Apollo NEXX: Designed for compatibility with the platform's requirements, ensuring smooth installation and no interference with production flow.

Enhanced Process Quality: Advanced thermal control reduces plating defects and ensures uniform results, even on complex wafer surfaces.

Operational Flexibility: Supports a wide range of plating processes, adapting to the demands of advanced production.

With the Heat Exchanger SMG GE-8040, manufacturers can push the performance limits of the Apollo platform, improving product quality and reducing operational costs, reinforcing their position in the next-generation semiconductor industry.
Endura® PVD
Seamless Compatibility Across PVD Platforms
Compatibility Across PVD Platforms

ENDURA PVD
Applied Materials

The SMG Heat Exchanger GE-9040 is an advanced solution specifically designed to optimize thermal management in the Endura platform by Applied Materials, a leading system for semiconductor manufacturing.

Utilizing innovative technologies and high-quality materials, our heat exchanger ensures reliable performance, energy efficiency, and ease of maintenance, meeting the critical demands of PVD (Physical Vapor Deposition) processes and other advanced operations.

Main Benefits:

Maximized Productivity: Effective thermal control reduces downtime and prevents thermal failures.

Energy Efficiency: Lower consumption due to optimized heat transfer.

Ease of Maintenance: Quick access for interventions and reduced maintenance costs thanks to predictive diagnostics.

Reduced Operational Risks: Stable performance even in extreme conditions, ensuring the quality of the produced wafers.
+ Integrated Bypass Option with Automatic Throttling Valve: Features the capability to integrate a bypass circuit equipped with an automatic throttling valve, enabling dynamic flow adjustments to optimize thermal regulation during process fluctuations or maintenance activities.

The SMG Heat Exchanger GE-9040 is ideal for managing the thermal requirements of physical vapor deposition processes, ensuring the Endura platform operates at maximum efficiency and quality while supporting the most advanced technological nodes in the semiconductor industry.

Choosing our solution, we push the boundaries of efficiency and reliability, solidifying the Endura platforms role as a global leader in advanced semiconductor manufacturing systems.
 Automatic Throttling Valve GE-9040 3P

Precise Temperature Setting,
with Flow, Pressure and Resistivity Control

Ideal for industries requiring stringent environmental control, including the Semiconductor, Pharmaceutical, Petrochemical and Manufacturing Industry, designed to meet the highest standards in thermal management.

Experience seamless integration into your systems with options for specialized configurations.

Reach out to us to discuss how we can adapt our solutions to your exact requirements.
Alarm Range Set 
Alarm ranges for critical parameters such as water flow, temperature, resistivity and pressure, both for operational processes and the facility. 
Delay, Scale, and Parameters
Access to advanced settings is protected by the login key, ensuring that only qualified users can make changes.
Pump Operation Time & Speed 
Pump operation time, to manage operating cycles. Pump speed, to adapt the system to specific process needs.

Precise Temperature Setting,
with Flow, Pressure and Resistivity Control

Ideal for industries requiring stringent environmental control, including the Semiconductor, Pharmaceutical, Petrochemical and Manufacturing Industry, designed to meet the highest standards in thermal management.

Experience seamless integration into your systems with options for specialized configurations.

Reach out to us to discuss how we can adapt our solutions to your exact requirements.
Alarm Range Set 
Alarm ranges for critical parameters such as water flow, temperature, resistivity and pressure, both for operational processes and the facility. 
Delay, Scale, and Parameters
Access to advanced settings is protected by the login key, ensuring that only qualified users can make changes.
Pump Operation Time & Speed 
Pump operation time, to manage operating cycles. Pump speed, to adapt the system to specific process needs.
FDC: From Signal Output to your Network
FDC Capability: From Signal Output to your Network
The FDC Capability is a feature that allows for the extraction of various signal outputs through its interface. These outputs can then be transferred via cable to the DAD (Data Acquisition Device) for monitoring each value and receiving alerts for values out of the set range.

Additionally, the system ensures immediate alerts for any deviations from the predefined range, providing robust support for proactive decision-making and system management.
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HMI Panel with Remote Control

Fast response times, low latency, installed directly on the equipment, with integrated or custom functions to control SMG Heat Exchanger. 

Customizable Options: Tailored to meet your specific requirements, our HMI panel offers customizable options, allowing you to integrate specialized functions or adapt the interface to suit your unique operational needs. 
High-Performance CE-Certified Heat Exchanger: Durable, Efficient, and Reliable
Our Heat Exchanger Series is designed with CE-certified materials, ensuring compliance with European regulations and maximum safety.

The construction features solid and highly durable materials, carefully selected for their reliability and long-lasting performance even in the most demanding operating conditions.

This heat exchanger offers numerous benefits:

- Superior thermal efficiency thanks to an optimized design that maximizes heat exchange.
- Long-term reliability with robust materials that minimize maintenance requirements.
- Versatility  making it ideal for industrial and commercial applications.
- Sustainability through energy-efficient design for reduced consumption.

With this heat exchanger, you gain a product that combines high performance with safety and durability, ensuring a long-lasting and valuable investment for your system.
Top-quality materials and technologies to deliver unmatched performance and reliability.
Industry-Leading Components:
Enhanced Performance with SMC Flow Meters:
Our chillers deliver superior performance by integrating SMC flow meters, which are globally recognized for their exceptional accuracy and reliability.

These advanced flow meters enable precise measurement and control of fluid flow rates, ensuring optimized efficiency and consistent operation. Our chillers not only maximize productivity across a wide range of applications but also provide:

- Enhanced energy efficiency reducing operational costs.

- Improved process stability thanks to accurate fluid management.

- Reliable performance ensuring long-term dependability.

Experience the perfect combination of cutting-edge technology and exceptional performance with our SMC flow meter-equipped chillers.
"Precision drives performance. With SMC PF3W504-N03-1 flow meters, our Heat Exchangers set the standard for efficiency, accuracy, and reliability in every application."
A900 - Anti Flooding System Tank
Leak Detection Tank for Enhanced Protection  
SMG provides an additional layer of safety for Chiller and Heat Exchanger systems with an advanced leak detection tank, designed to minimize the risk of liquid leaks and prevent damage to equipment and facilities.

The system includes the A900 tank, specifically designed to collect any leaked liquids. A highly sensitive sensor, positioned within the collection tray, detects the presence of liquid, ensuring rapid identification of potential issues.

Sensor Activation and Monitoring:

- The sensor is fully integrated with a monitoring panel or control unit, offering real-time alerts.
- The monitoring panel features LED visual indicators and an audible alarm, providing immediate notifications in case of a liquid leak.

This proactive solution helps protect your operations, ensuring peace of mind while safeguarding both equipment and infrastructure.
  • GE - 8040
  • GE - 9040
Description:
Cooling Methode Water-Cooled
Technology Liquid-to-Liqui Heat Exchanger Close Loop
Control Methode na
Circulating Fluid Clear Water- DIW-Glycole/Water
Temperature Range 6 to 22 °C
Heating Capacity Kw na
Cooling Capacity 70 Kw
Process Fluid Temperature Facility Water Temp + 3°C
Process Fluid Pressure 4 at 50 Hz
Process Fluid Flow range 60 at 50 Hz
Facility Cooling Water Flow Range 30 to 60 L/min
Facility Cooling Water Temperature 4 to 18 °C
Facility Cooling Water max pressure 4 Bar
Temperature Stability 0,2 °C
Pump Capacity 90 at 70 Hz
Pump Frequency range 30-70 Hz
Resistivity 0,5 to 4 MOhm
Port Size Supply CL 1” Facility CL 1” Drain 1/2" Inch
Tank Capacity 60 L
Display HMI 10" TFT
Power Supply Voltage 200-240V 1P
Frequency 50 Hz
Max Operating Current 10 A
Breaker capacity 16 A
Dimension LxWxH 700x700x1200 mm
Weight 90 Kg
Maintenance Clearence Area 700 mm Front and Rear side
Maintenance Clearence Area 600 mm Left and Right side 
Description:
Cooling Methode Water-Cooled
Technology Liquid-to-Liqui Heat Exchanger Close Loop
Control Methode na
Circulating Fluid Clear Water- DIW-Glycole/Water
Temperature Range 6 to 22 °C
Heating Capacity 6 Kw
Cooling Capacity 170 Kw
Process Fluid Temperature 16 °C
Process Fluid Pressure 6 °C
Process Fluid Flow range 240 L/min
Facility Cooling Water Flow Range 120 L/min
Facility Cooling Water Temperature 6 °C
Facility Cooling Water max pressure 4 Bar
Temperature Stability 0,2 °C
Pump Capacity 260 L/min
Pump Frequency range 30-70 Hz
Facility Water Flow Range 140 L/min
Port Size -
Tank Capacity 60 L
Display HMI 10" TFT
Power Supply Voltage 220V 1P
Frequency 50 Hz
Max Operating Current 24 A
Breaker capacity 32 A
Dimension LxWxH 700x800x1200 mm
Weight 120 Kg

SMG RC-9040:
HMI WITH REMOTE CONTROL

Fast response times, low latency, installed directly on the equipment, with integrated or custom functions to control SMG Heat exchanger Series.

With remote access functionality, you can monitor and control your SMG Heat Exchanger, providing flexibility and convenience in fab operation. 

Benefit from lightning-fast response capabilities, enabling real-time adjustments and control over critical parameters. 

Installed where you need to, our HMI panel delivers robust control and functionality, ensuring your SMG Heat Exchanger operates at peak efficiency.
Request More Info

SMG RC-9040: HMI WITH REMOTE CONTROL

Fast response times, low latency, installed directly on the equipment, with integrated or custom functions to control SMG Heat exchanger Series.

With remote access functionality, you can monitor and control your SMG Heat Exchanger, providing flexibility and convenience in fab operation. 

Benefit from lightning-fast response capabilities, enabling real-time adjustments and control over critical parameters. 

Installed where you need to, our HMI panel delivers robust control and functionality, ensuring your SMG Heat Exchanger operates at peak efficiency.
Request More Info
Need a Custom Solution?

Every process is unique, and so is the solution we provide. Whether it’s specific flow rates, technical specs, or advanced functionalities, we create heat exchangers built just for you.  
Contact Us for a Tailored Solution
SMG AF-A2000 WATER LEAK CONTROL MONITOR 
SMG provides an added layer of protection for Chiller and Heat Exchanger systems, helping to mitigate the risk of liquid leaks and minimize potential damage to equipment and facilities.

The system includes the A900, the tank designed to capture any liquid leaks, along with a sensor positioned within the tray to detect the presence of liquid.

Sensor Activation and Monitoring Panel Setup: The sensor within the collection tray is activated and connected to a monitoring panel or control unit.

The monitoring panel is equipped with visual indicators such as LED lights and an audible alarm system to alert users in the event of a liquid leak detection. 
SMG AF-A2000 WATER LEAK CONTROL MONITOR 
SMG provides an added layer of protection for Chiller and Heat Exchanger systems, helping to mitigate the risk of liquid leaks and minimize potential damage to equipment and facilities.

The system includes the A900, the tank designed to capture any liquid leaks, along with a sensor positioned within the tray to detect the presence of liquid.

Sensor Activation and Monitoring Panel Setup: The sensor within the collection tray is activated and connected to a monitoring panel or control unit.

The monitoring panel is equipped with visual indicators such as LED lights and an audible alarm system to alert users in the event of a liquid leak detection. 
A900 - Anti Flooding System Tank
Leak Detection Tank for Enhanced Protection  
SMG provides an additional layer of safety for Chiller and Heat Exchanger systems with an advanced leak detection tank, designed to minimize the risk of liquid leaks and prevent damage to equipment and facilities.

The system includes the A900 tank, specifically designed to collect any leaked liquids. A highly sensitive sensor, positioned within the collection tray, detects the presence of liquid, ensuring rapid identification of potential issues.

Sensor Activation and Monitoring:

- The sensor is fully integrated with a monitoring panel or control unit, offering real-time alerts.
- The monitoring panel features LED visual indicators and an audible alarm, providing immediate notifications in case of a liquid leak.

This proactive solution helps protect your operations, ensuring peace of mind while safeguarding both equipment and infrastructure.

Request more Informations

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