Service Center

Welcome to our Lab, a cutting-edge environment dedicated to the repair, quality control, and upgrading of complex components.

Equipped with advanced technological tools and supported by a team of highly skilled technicians and engineers, our laboratory is committed to ensuring maximum reliability and optimal performance of your systems.

Here, every detail is meticulously examined to guarantee that your devices always operate at their best. Innovation, expertise, and attention to detail are at the heart of our work.

Motor Robot and Drive Head Motors

SMG offers repair and refurbishment services for many popular Motor and Drive Head Motors.

System Refurbishment, Retrofit, and Upgrades
Parts Repair, Consumable, and Spare Part Supply
Supply of Specific Components: Ceramic, Quartz, and Bellows Heater Supply and Refurbishment
ESC (Electrostatic Chuck) – New Supply and Refurbishment

HP+ Motor Robot Set Upper/Lower

HP+ Motor Robot Set Upper/Lower

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Repair/Refurbishment and Test on Tool:
PCB boards P5000, Centura and Producer

We specialize in professional PCB (Printed Circuit Board) repair and testing to ensure reliable performance that meets industry standards. Our service covers a wide range of electronic devices, from Digital I/O Interfaces to Plll Boards.

PCB Amat Plll VME SBC Synergy

PCB Amat Plll VME SBC Synergy

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Request PCB in Stock

Repair/Refurbishment Capabilities:

Power Supply, RF Generators, and Controllers
LFC (Liquid Flow Controller) and MFC (Mass Flow Controller)
Injection Valve Services
Turbo Pumps (Leybold, Ebara, Seiko Seiki)
Spindle (NVLS)

SCR Lamp Driver 15 Zone

SCR Lamp Driver 15 Zone

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Solutions for CMP Obsolescence

We develop proven solutions to equipment and part obsolescence for our clients and for ourselves.

We don’t just replicate, we innovate.

By asking how things can be improved, we challenge ourselves to devise and optimize. SMG continues to support equipment that OEMs do not, and we even support equipment for which OEMs no longer exist.

Parts and solutions for CMP Polishers

Our team of engineers and technology experts are here to help you design and experiment with new technology and ideas. We provide CMP services to advance your technology, integrate new materials into known processes and more.

Product Range

• Mirra Cross Hub Refurbishment
• Mirra HCLU 200MM Loadcup
• Platen Refurbishment & Teflon Coating
• Pad Conditioner Teflon Coating
• Mirra Wet Robot Refurbishment & Upgrade

Mirra - Head Rotation Spindle

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Request SOW and Quote

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Parts and solutions for PVD Endura

Our offerings include a robust preventive maintenance program to minimize downtime and maximize equipment performance, along with expert operator training conducted at one of our dedicated facilities to ensure your team is fully prepared to operate the system efficiently.

Product Range

• Endura 5500 PVD 24V DC Power Supply Repair
• PVD Magnet Repair:
0010-21810 G-12 Durasource Magnet
0010-21403 TTN Durasource Magnet
0010-20768 G-12 8" Magnet
0010-20225 AL A-Type Magnet
0010-20224 AL A-Type 6" Magnet
0010-20258 Ti A- Type Magnet
0010-20328 Ti Durasource Magnet
• Ion Gauge Power Supply

Endura PVD Magnet

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Request SOW and Quote

Click the button above, our team will reach out to discuss your project.

100% Compleate Refurbish Service

This service outlines the scope of work for the refurbishment of valves. The purpose of this service is to restore the functionality and efficiency of valves to ensure optimal performance in various applications.

Benefits:

Enhanced performance and efficiency of Valves.
Extended lifespan of equipment.
Reduced risk of downtime due to unexpected failures.
Improved reliability and consistency in processes.
Ensure the reliability and longevity of your valves with our comprehensive service offerings.

SMG Native OS Test program for valves testing.

Comprehensive Valve Testing

Testing Phase: + 100 Cycles Up/Down

- Functional Testing:
Verifying the proper operation of valves under various conditions to ensure reliability.
- Leakage Assessment:
Detecting and quantifying potential leaks to prevent operational inefficiencies.
- Pressure Testing:
Evaluating the valve’s capacity to withstand operational pressures and extreme scenarios.
- Performance Analysis:
Monitoring and assessing flow rates, pressure drops, and overall functionality.
- Compliance Certification:
Ensuring valves meet all regulatory and industry-specific requirements.

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Enter your details and we will be in touch to discuss your project.

Request SOW and Quote

Enter your details and we will be in touch to discuss your project.

Whether for new installations, routine maintenance, or troubleshooting, our comprehensive repair/refurbish and valve testing guarantees the performance you can trust in even the most demanding environments.

We also support other brands; if they are not listed, please feel free to contact us.

Genmark Series

Yaskawa Series

Kawasaki Series

Rorze Series

Brooks Series

Advanced Test Bench with 6 Hours Run

The primary goal is to ensure the optimal performance and prolonged lifespan of the robots, including the calibration.

These tests confirm that all functionality has been restored and that the device is operating within specifications.
Our in-house developed test kits are the result of extensive research and development.

These tools allow us to identify faults even in the most intricate components, guaranteeing accurate intervention.

With years of experience on Motors, Robots and Wafer Handling, we provide a complete overhaul, refurbishment and repair service with test kit developed ad-hoc internally by our company.

The primary goal is to ensure the optimal performance and prolonged lifespan of the robots, including the calibration.

We also support other robot and models; if not listed, contact us.

Repair

- Functional Repair and Calibration
- Fix Specific Issue (Failure)
- Failed Parts Replace and Calibrate

Full Repair

- Enhanced Repair and Calibration
- Failed Parts Replace
- Worn Parts (lifetime) replace

Overhaul

- Completely disassembled
- Examine Every Pars
- Replace Parts and Calibration

Repair Flow Robot: Precision Restoration for Optimal Performance

Full Repair and Overhaul

- Completely disassembled
- Examine Every Pars
- Replace Parts
- Test and Calibration

Browse Robot Service List

Brand	Model	Tool Type	Repair	Overhaul
Canon	ES3 Scanner Wafer Transfer Robot	PG-CR-B0D1	◎	◎
Brooks-PRI Robot	ATM-100		◎	◎
Brooks-PRI Robot	ATM-105	KLA_OP2000 ; Thermawave ; August 量測機台 Rudolph	◎	◎
Brooks-PRI Robot	ATM-107	KLA_Tencor 量測機台	◎	◎
Brooks-PRI Robot	ATM-107B	ASTI_Sorter	◎	◎
Brooks-PRI Robot	WTM-107B	IPEC_CMP_776 R1&2 and Momentum_R2	◎	◎
Brooks-PRI Robot	WTM-107EGW	IPEC_CMP_Momentum_R1	◎	◎
Brooks-PRI Robot	ATM-204	LAM_Autoload	◎	◎
Brooks-PRI Robot	ATM-205	KLA_Quantox XP	◎	◎
Brooks-PRI Robot	ABM-205	IPEC_CMP_776 and Momentum_R3	◎	◎
Brooks-PRI Robot	ATM-207	KLA_Tencor 量測機台	◎	◎
Brooks-PRI Robot	ATM-305	Mattson AST-2800	◎	◎
Brooks-PRI Robot	ATM-307	Mattson RTP	◎	◎
Brooks-PRI Robot	ATM-405	KLA_量測機台	◎	◎
Brooks-PRI Robot	ABM-405	AMAT_Producer ; AMAT_Quantum; OP	◎	◎
Brooks-PRI Robot	ATM-407	KLA_Surfscan, AMAT Producer	◎	◎
Brooks-PRI Robot	ABM-407	Rudolph_量測機台	◎	◎
Brooks-PRI Robot	ABM-407B	KLA_量測機台	◎	◎
Brooks-PRI Robot	VAC-407-2A	Varian VIISta 810 (Implant)	◎	◎
Brooks-PRI Robot	DBM-2406, DBM-2407 DBM-2706	SEZ SP4300, Varian VIISta, FSI ANTARES DBM-2706(Implant)	◎	◎
Brooks-PRI Robot	WTM-511	AMAT-CMP wet (AMTCMP)	◎	◎
Brooks-PRI Pre-aligner	PRE-200, 200B, 201, 201B	For 8 " Wafer	◎	◎
Brooks-PRIPre-aligner	PRE-300, 300B, 301, 301B	For 8" & 12 " Wafer	◎	◎
PRI CNTL	ESC-100 系列	PRI Robot_Old Type	◎
PRI CNTL	EDC-2400	FSI, SEZ	◎
PRI CNTL	EDC-2800	FSI, Varian(Implant)	◎
PRI CNTL	ESC-200, 201, 204, 212, 218, 222	PRI Robot	◎
Brooks	ATR-8_NVLS	Novellus_Vector, Inova XT, ECP-300mm(CVD)	◎	◎
Brooks	ATR-8_LAM	LAM_Etch_2300 Exelan(Etch)	◎	◎
Brooks	ATR-7_NVLS	Novellus_ECP-200 mm, Sabre_300mm	◎	◎
Brooks	ATR-7_Arm set	Novellus_ECP-200 mm, Sabre_300mm	◎	◎
Brooks	AQR-7	Novellus_ECP(Process) 200mm	◎	◎
Brooks	AQR-7	Novellus_ECP(Process) 300mm, Sabre_300mm	◎	◎
Brooks	Pre-Aligner 7391	LAM	◎	◎
Brooks	AQR-7_Arm Set	Novellus_ECP(Process)	◎	◎
Brooks	Traverser 002-8761-05	Novellus_CVD	◎	◎
Brooks	Controller	For ATR7, AQR7, ATR8	◎
Brooks	Robot MTR5	Novellus	◎	◎
Brooks	Robot MTR5	Lam	◎	◎
Brooks	Robot MTR5 Armset	Novellus	◎	◎
Brooks	Robot MTR5 Armset	Lam	◎	◎
Brooks	MAG-7 Armset	Lam_200mm	◎	◎
Brooks	MAG-7 Armset	Lam_300mm (Etch)	◎	◎
Brooks	MAG-7 Armset	Novellus_CVD _200mm	◎	◎
Brooks	MAG-7 Armset	Novellus_CVD _300mm	◎	◎
Brooks	MAG-8	AMAT Producer_GT(CVD), Vecco, ASM, Varian	◎	◎
Brooks	MAG8 controller	AMAT Producer_GT(CVD), Vecco, ASM, Varian	◎
Brooks	MAG-9	◎	◎
MAG70	AKT	◎	◎	◎
Brooks	MAG74	Anelva	◎	◎
Brooks	MAG70 Arm set 4300	AKT 4300	◎	◎
Brooks	MAG70 Arm set 5500	AKT 5500	◎	◎
Brooks	MAG74 Arm set	Anelva	◎	◎
Brooks	TBM	Brooks Load Port	◎	◎
Brooks	Razor/Controller		◎	◎
Brooks	Robot MAG7 E4	LAM 2300	◎	◎
Brooks	Robot MAG-7	Novellus_Concept 2, 3(CVD)	◎	◎
Brooks	Robot MAG-7	Lam_2300(Etch)	◎	◎
Kensington	3軸Robot	AMAT_CVD Producer	◎	◎
Kensington	5軸Robot	AMAT_CMP FI	◎	◎
Kensington	ALIGNER	AMAT FI	◎	◎
Kensington	3軸Controller R1	AMAT_FI(CVD)	◎
Kensington	3軸Controller R2	AMAT_FI(CVD)	◎
Kensington	5軸Controller	AMAT_CMP	◎
Kawasaki	Robot 3NS410B-Axxx	AMAT_Producer SE, Producer eXT(CVD & Etch)	◎	◎
Kawasaki	Robot 3NS410B-Bxxx	AMAT_Producer SE, Producer eXT(CVD & Etch)	◎	◎
Kawasaki	Robot 3NS411B-Fxxx	AMAT_Reflexion FI(CMP)	◎	◎
Kawasaki	Robot 3NS411B-Gxxx	AMAT_Reflexion FI(CMP)	◎	◎
Kawasaki	Robot 3NS511C-Fxxx	AMAT_Reflexion Wet(CMP)	◎	◎
Kawasaki	Robot 3NS511C-Gxxx	AMAT_Reflexion Wet(CMP)	◎	◎
Kawasaki	Robot 3NS420B	ASM XP4	◎	◎
Kawasaki	Robot 3NS510S	Nissin	◎	◎
Kawasaki	Robot 3NS520S	Nissin	◎	◎
Kawasaki	Robot 3NX510B	AMAT_FI Producer GT(CVD)	◎	◎
Kawasaki	Robot 3NX520B	Thermawave Optiprobe 7341	◎	◎
Kawasaki	Robot 3NX540B	AMAT_FI Producer eXT(Etch)	◎	◎
Kawasaki	Robot 3NX550B	KLA_FX-100(Metrology)	◎	◎
Kawasaki	Robot 3NT410B	AMAT Producer GT	◎	◎
Kawasaki	Robot 3NT420B	Rudolph_量測機台, ASM, DNS SU3200	◎	◎
Kawasaki	Robot 3NT510B	LAM 2300	◎	◎
Kawasaki	Robot 3NT520B		◎	◎
Kawasaki	Robot 3NT570C	AMAT Producer GT	◎	◎
Kawasaki	Robot 3TX210B	AMAT FI	◎	◎
Kawasaki	Robot Controller C61C Repair	AMAT_FI	◎
Kawasaki	Robot Controller C61D Repair	AMAT_FI	◎
Kawasaki	Robot Controller C61E Repair	AMAT_FI	◎
Kawasaki	Robot Controller 30C61C Repair	AMAT_FI	◎
Kawasaki	Robot Controller 30C61D Repair	AMAT_FI	◎
Kawasaki	Robot Controller 30C61E Repair	AMAT_FI	◎
Kawasaki	Robot Controller 30C60F Repair	Kawasaki C type Controller	◎
Kawasaki	Robot Controller 30C63E Repair	Kawasaki C type Controller/SB920 Robot	◎
Kawasaki	Robot Controller 30C65E Repair	AMAT_FI	◎
Kawasaki	Robot Controller 30C67E Repair	Kawasaki D type Controller	◎
Kawasaki	Robot Controller 30C65F Repair	KLA Metrology Robot controller	◎
Kawasaki	Robot Controller 30D61E Repair	AMAT Robot controller	◎
Kawasaki	Robot Controller 30D61H Repair	AMAT Robot controller	◎
Kawasaki	Robot Controller 30D61I Repair	AMAT_LK Reflexion Controller / NS511C + NS41	B ◎
Kawasaki	Robot Controller 30D60G Repair		◎
Kawasaki	Robot Controller 30D60E Repair	Kawasaki D type Controller/NT510B with Aligner	◎
Kawasaki	Robot Controller 30D63E Repair	Kawasaki D type Controller/SB922 Robot	◎
Kawasaki	Robot Controller 30D60F Repair	Kawasaki D type Controller/NT520B, TT210 Robot	◎
Kawasaki	Robot Controller 30D63F Repair	Kawasaki D type Controller	◎
Kawasaki	Robot Controller 30D65F Repair	Kawasaki D type Controller	◎
Kawasaki	Robot Controller 30D65I Repair	Kawasaki D type Controller	◎
Kawasaki	Robot Controller 30D61K Repair	Kawasaki D type Controller	◎
Kawasaki	Robot Controller 30D65K Repair	Kawasaki D type Controller	◎
Kawasaki	Robot Controller 30D60H Repair	Kawasaki D type Controller	◎
Kawasaki	Robot Controller 30D66D Repair	Kawasaki D type Controller/RD920 Robot	◎
Kawasaki	Robot Controller 30D66E Repair	Kawasaki D type Controller/SS910 Robot	◎
Kawasaki	Robot Controller 30C08H Repair	DNS SS3000 Controller	◎
Kawasaki	Pre-Aligner	AMAT_FI Centura	◎	◎
Kawasaki	Aligner NS001S-L006	Work with NT520B/30D60F	◎	◎
Kawasaki	Aligner_NS004S-C005		◎	◎
Kawasaki	TS220 MHU	DNS SS3000	◎	◎
Kawasaki	TS310IHU	DNS SS3000	◎	◎
Kawasaki	TS520 BHU	DNS SK 2000	◎	◎
Kawasaki	SS621/SS621/SL922	DNS Tool	◎	◎
Kawasaki	SS610/611/920/921 Arm	DNS Tool	◎	◎
Kawasaki	FC-3100 Arm	DNS_FC-3100	◎	◎
Kawasaki	TS/520/310/220 Arm	DNS_Aquaspin SS3000	◎	◎
Yaskawa	Robot XU-RCM6420	AMAT_ECP Slimcell	◎	◎
Yaskawa	Robot XU-RCM6422	AMAT_ECP Slimcell	◎	◎
Yaskawa	Robot XU-RCM6841	AMAT_FI for DPN Endura	◎	◎
Yaskawa	Robot XU-RCM6801	AMAT_FI for DPN Endura	◎	◎
Yaskawa	Robot XU-RCM6802	AMAT_FI for DPN Endura	◎	◎
Yaskawa	Robot XU-RCM7230	AMAT_FI for Vantage	◎	◎
Yaskawa	Robot XU-RCM7231	AMAT_FI for Vantage	◎	◎
Yaskawa	Robot XU-RCM7410	Axcelis IHEI 701(Implant)	◎	◎
Yaskawa	Robot XU-RCM8100	Ebara CMP Dry Robot	◎	◎
Yaskawa	Robot XU-RC400M	AMAT, Rudolph August-AXI-930	◎	◎
Yaskawa	Robot XU-RC350D-J03	Varian Implant	◎	◎
Yaskawa	Robot XU-RC350D-C03	Rudolph	◎	◎
Yaskawa	Robot XU-RC350D-K01	DNS SU3000	◎	◎
Yaskawa	Robot XU-RC350D-B23	SpeedFam EP-300X	◎	◎
Yaskawa	Robot XU-RC350D-I01	Ebara FREX300S	◎	◎
Yaskawa	Robot XU-RC350D-1C06	AMAT	◎	◎
Yaskawa	Robot XU-RC350D-1B06	AMAT Vantage	◎	◎
Yaskawa	Robot XU-RC350S-J01	AMAT Producer	◎	◎
Yaskawa	Robot XU-RC595S		◎	◎
Yaskawa	Robot XU-RC845M	TEL Vigus	◎	◎
Yaskawa	Robot XU-RC870M		◎	◎
Yaskawa	Robot XU-RCM4900	Ebara CMP Dry Robot	◎	◎
Yaskawa	Robot XU-RCM4901	Ebara CMP Wet Robot	◎	◎
Yaskawa	Robot XU-RSM4800	Ebara CMP Wet Robot	◎	◎
Yaskawa	Robot XU-RCM4700	PEP3510	◎	◎
Yaskawa	Controller, Yaskawa 4700	PEP3510	◎
Yaskawa	Robot XU-RCM53B0	Ebara CMP Wet Robot	◎	◎
Yaskawa	Ebara CMP Wet Robot		◎	◎
Yaskawa	Robot XU-RCM53E0A	Ebara CMP Dry Robot	◎	◎
Yaskawa	Robot XU-RCM5301	Ebara CMP Wet Robot	◎	◎
Yaskawa	Robot DVM4100		◎	◎
Yaskawa	Robot XU-RCM5300	Ebara CMP Wet Robot	◎	◎
Yaskawa	Robot XU-RCM5301A	Ebara CMP Dry Robot	◎	◎
Yaskawa	Robot XU-RSM53D0	Ebara CMP FREX300X Wet Robot	◎	◎
Yaskawa	Robot XU-RSM5330	Ebara CMP Wet Robot	◎	◎
Yaskawa	Robot XU-RCM9120	Ebara CMP Dry Robot	◎	◎
Yaskawa	Robot XU-RCM9205	KLA Metrology	◎	◎
Yaskawa	Robot XU-RCM9206	KLA Metrology	◎	◎
AMAT	VHP	AMAT Vacuum Robot	◎	◎
AMAT	XP	AMAT Vacuum Robot	◎	◎
AMAT	XP Arm	AMAT Vacuum Robot	◎	◎
AMAT	XP Controller	AMAT Vacuum Robot	◎
AMAT	Mesa MF Robot	AMAT	◎	◎
AMAT	Mesa MF Robot Arm	AMAT	◎	◎
AMAT	VTM Robot Arm	AMAT	◎	◎
AMAT	P-5000 Robot	0010-76051 0010-13320 0010-13321 0010-09195	◎	◎
AMAT	VXP Producer Robot		◎	◎
Yaskawa	Robot XU-RCM8220	Ebara CMP Dry Robot	◎	◎
Yaskawa	Robot XU-RCM8250	Ebara CMP Dry Robot	◎	◎
Yaskawa	Robot XU-RCM5020	Ebara CMP Robot	◎	◎
Yaskawa Controller	XU-CM5500		◎
Yaskawa Controller	XU-CM5510	Ebara Robot 5020 controller	◎
Yaskawa Controller	XU-CM6180	Ebara Robot 53E0A controller	◎
Yaskawa Controller	XU-CM6101	Ebara Robot 5301 controller	◎
Yaskawa Controller	XU-CM6310	Ebara Robot controller	◎
Yaskawa Controller	ERCR-NS01-B004	AMAT, Rudolph	◎
Yaskawa Controller	ERCR-NS01-B004-E1	AMAT	◎
Yaskawa	Driver, BCD2081D	AMAT FI Yaskawa 6841 Driver	◎
Yaskawa	Driver, BCD2011C	AMAT FI Yaskawa 7231 Driver	◎
Yaskawa	Driver, BCD3111	AMAT FI Yaskawa Driver	◎
Yaskawa	Driver, BCD3301	AMAT FI Yaskawa Driver	◎
Yaskawa	Controller, CN0240A	AMAT, FI, Yaskawa 6420 Controller	◎
Yaskawa	Controller, CN0521	AMAT, FI, Yaskawa 6420 Controller	◎
Yaskawa	Controller, CN0821A	AMAT, FI, Yaskawa	◎
Yaskawa	Controller , CN1170A	AMAT FI, Yaskawa 6841 Controller	◎
Yaskawa	Controller , CN1112A	AMAT FI Yaskawa 7231 controller	◎
Yaskawa	Controller , CM8310	Ebara Dry Robot controller	◎
Yaskawa	Controller , CM8510	Ebara Dry Robot controller	◎
Yaskawa	Controller , CM8910	Ebara Dry Robot controller	◎
Yaskawa	Robot Pre-Aligner XU-ACP4801	AMAT_DPN	◎	◎
Yaskawa	Robot Pre-Aligner XU-ACP130		◎	◎
Yaskawa	Robot Pre-Aligner XU-ACP4860	AMAT_FI for DPN	◎	◎
LAM	Indexer	NVLS_CVD	◎	◎
LAM	Vortex	NVLS_Vector	◎	◎
LAM	Vortex Wet	NVLS_ECP	◎	◎
LAM	TEBR	NVLS_PVD	◎	◎
LAM	Vortex Dual arm Robot	NVLS_Vector	◎	◎
LAM	Vortex Extreme ATM Robot	NVLS_Vector	◎	◎
LAM	Vortex Robot controller	NVLS_Vector	◎
LAM	Vortex Traverser	NVLS_Vector	◎	◎
LAM	Servo Spindle Assy	NVLS Vector	◎	◎
LAM	MACH 1	LAM Tool	◎	◎
LAM	MACH 4	LAM Tool	◎	◎
LAM	MACH 1 Controller	LAM Tool	◎
LAM	MACH 4 Controller	LAM Tool	◎	◎
LAM	EOS BE Robot	LAM Tool	◎	◎
LAM	EOS BE Controller	LAM Tool	◎	◎
LAM	EOS EFEM Robot	LAM Tool	◎	◎
LAM	EOS EFEM Controller	LAM Tool	◎
LAM	Gammar controller	LAM Gamma Tool	◎
LAM	Gammar Arm	LAM Gamma Tool	◎
Mattson	Mattson Mapping Arm		◎
Trust	Trust Controller	NVLS_CVD	◎
LAM	AHM LTM assy	NVLS_CVD	◎	◎
LAM	LTM Type 2	NVLS_CVD	◎	◎
Rorze	700	AMAT_CMP Mirror	◎	◎
Rorze	Controller	AMAT, Ebara	◎
Rorze	701	Ebara_CMP EPO-113	◎	◎
Rorze	711		◎	◎
Rorze	713	Mattson RTP 3000	◎	◎
Rorze	717	Mattson RTP 6000	◎	◎
Rorze	721	AMAT Slimcell	◎	◎
Rorze	751		◎	◎
Rorze	RR717		◎	◎
Rorze	757	TEL	◎	◎
Genmark	GB4P		◎
Genmark	GB4	ASM A400	◎	◎
Genmark	GB4S	ASM A400S	◎	◎
Genmark	GB7	Suss Coater
Genmark	GB7S
Genmark	GB8	Ultratech Stepper, Rudolph, ASM
Genmark	Traversers
Sankyo	SR8232	PSK Supra	◎	◎
Sankyo	SR8250		◎	◎
Sankyo Controller	SC3150	Lam	◎
Sankyo Controller	SC5000		◎
Sankyo	7150	ASML Load	◎	◎
Sankyo	SR8240	PSK Supra, Lam	◎	◎
ASML	MK3 DFA	ASML_Litho	◎	◎
ASML	Load port (UP Type)	ASML_Scanner	◎	◎
ASML	Load port (Down Type)	ASML_Scanner	◎
ASML	MK3 Arm	ASML_Scanner	◎	◎
ASML	TSU Motor	ASML_Scanner	◎	◎
ASML	TSU Aligner	ASML_Scanner	◎	◎
ASML	Balance Mass Encoder	ASML_Scanner	◎	◎
ASML	CCU	ASML_Scanner	◎	◎
ASML	Chuck Park Lock	ASML_Scanner	◎	◎
ASML	Open X-Beam	ASML_Scanner	◎	◎
ASML	Drift Motor	ASML_Scanner	◎	◎
ASML	MK5 35XT Scara	ASML_Scanner	◎	◎
ASML	WH Double Folder Robot		◎	◎
SHINKO old model SBX92101286-2		TeliusSP	◎	◎
SHINKO New model		TeliusSP	◎	◎
SHINKO old model Contlr		TeliusSP	◎
SHINKO new model Contlr		TeliusSP	◎
TAZMO	TAZMO Vacuum robot		◎	◎
SANKYO	SANKYO Wafer transfer robot	SR8602-0002AAR	◎	◎
TEL Vigus M3 VTM			◎	◎
TEL Vigus M2 Cont.			◎
TEL Leaga Robot			◎	◎
TEL Arm Lock			◎	◎
Moog Robot			◎	◎
Milara /Mirro			◎	◎
Tazmo Robot TDAIE		Tazmo Transfer unit	◎	◎
Tazmo Aligner MA-ABP			◎	◎
Tazmo Controller IC-Controller			◎
Hirata AR-WL180CL-3		Ebara CMP 300S2	◎	◎
Hirata AR-W180CL-3-S-300-D2		DNS	◎	◎
Hirata controller 300S2		DNS	◎
Hirata Z 3-C Arm			◎	◎
Hitachi Foup Arm			◎	◎
Aitec Robot AR-WV300		Panasonic	◎	◎
Aitec Controller AI-2500A		Panasonic	◎
Semitool New 610T0380		Semitool	◎	◎
Semitool Old 610T		Semitool	◎	◎
ADE 351-0711			◎	◎
ADE Contlr 351			◎
JEL GHR/GTHR/DTVHR		ASM XP-4	◎	◎
JEL Signa7		Hitachi	◎	◎
JEL Controller C4410			◎
MECS APR800		Canon
MECS UTC1000		Walking Janson 999
MECS UTC820Z		Nissin, Hitachi CD
MECS UTC800、801P		Nissin, Walking Janson 999	◎	◎
MECS UTC800、801P Contlr		Nissin, Walking Janson 1000	◎
MECS UTX1000 Series		Nissin, Hitachi ASM
MECS UTW3400		Canon
MECS UTW3100P		Canon
MECS OF250 Controller		ASM Eagle 10	◎
MECS Aligner OF250		ASM Eagle 10	◎	◎
MECS Aligner OFH100		ASM Eagle 10
Dainippon		Shibuara	◎	◎
Daihen SPR956		Ulvac, AKT	◎	◎
Daihen SPR955			◎	◎
Daihen SPR951		AKT	◎	◎
Daihen SPR907			◎	◎
Daihen SPR906		DNS	◎	◎
Daihen SPR903		DNS	◎	◎
Daihen SPR902			◎	◎
Daihen SPR8501			◎	◎
Daihen SPR8101			◎	◎
Daihen SPR811S			◎	◎
Daihen SPR811		Ulvac	◎	◎
Daihen SPR812		Ulvac	◎	◎
Daihen SPR809		Ulvac	◎	◎
Daihen	SPR807	Ulvac	◎	◎
Daihen	SPR806S		◎	◎
Daihen	SPR806	Ulvac	◎	◎
Daihen	SPR805		◎	◎
Daihen	SPR802	Ulvac	◎	◎
TEL	TEL Track Lithius Robot		◎	◎

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Browse Robot Service List

Motor Robot, Spin and Drive Head Motors

SMG offers repair and refurbishment services for many popular Motor, Spin and Drive Head Motors.

Model Numbers include (but are not limited to):

220T0012-501, 220T0026-100, 220T0035-100, 220T0046-100, 220T0047-100, 220T0049-100, 220T0055-100, 220T0059-502, 220T0063-09, 220T0002-507, 220T0073-100, 220T0081, T61005-30, 0090-02952, 0090-02953, T61105-56, HT02001-D03-HE

429T2032 Chemical I/O / Lift Rotate Assembly

Semitool Spin Head Motor

HP+ Motor Robot Upper/Lower

Semitool Spin Head Motor

Novellus Motor Assy 15-318030-00

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Power Supply and RF Match

Precision repairs for circuits and components related to impedance matching in RF applications, optimizing efficiency and minimizing signal loss.

Plus comprehensive configuration and calibration services to ensure that all components meet the required performance specifications and function with the highest accuracy.

Semitool Raider Series

SMG Technology takes in the Tool/Process specs and design a system spec for a tool to refurbish and meet the customers specs.

Product Range

• Gold box controls
• Spin Motors
• Dynatronix Power Supplies
• Affinity chiller
• Computer repair/exchange
• Robots
• Linear tracks
• Sigma 2 Amplifiers and motors
• Lift rotates
• Rotors
• End effector assembly and blades
• Pumps
• Process bowls
• Used tool trading and turn key refurbishment

DYNATRONIX Power supply

RF Match

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Vacuum Test and Perfect Restoration

How It Works

Contact us for an initial consultation and SOW.
Ship your turbo pump to our service center.
Receive a detailed evaluation and transparent estimate.
Upon approval, we proceed with the repair.
Return delivery with a complete report and functionality guarantee.

Our comprehensive service for vacuum turbo pumps ensures optimal performance and longevity of your equipment. SMG provide thorough maintenance and repair services to keep your vacuum turbo pumps operating at peak efficiency.

Turbo Pump Edwards STP-451C

Models:

- Ebara Oil Vacuum pumps 1005, 1010, 1015, 2005, 2010, 2015, 2021, 2004, 2008, 2012, 2020, 2033, 2063
- Edwards Oil Vacuum pumps RV3, RV5, RV8, RV12, E2M0.7, E2M1, E2M1.5, E2M2, E2M5, E2M8, E2M12, E1M18, E2M18, E2M28, E2M40, E2M80, E2M175, E2M275.
- Leybold Oil Vacuum pumps D330, D650, D950, VD301, VD401, VS1501, VS2401 , 361C TURBOVAC OERLIKON
- Pfeiffer Oil Vacuum pumps DUO2.5, DUO5, DUO10, DUO20, DUO30
- Ulvac Oil Vacuum pumps D330, D650, D950, VD301, VD401, VS1501, VS2401
- Varian Oil Vacuum pumps DS102, DS202, DS302, DS402, DS602, SD91, CP451, SD200, SD300, SD450, SD700, SD1400, CD200, CD300, CD700, CD1400
- Dry Scroll Vacuum pumps Scroll vacuum pump Edwards Varian XDS5, XDS10, XDS35i, ESDP12/30, ESDP30/30A, GVSP30 PTS300, PTS600

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FACILITY: Heat Exchanger and Chiller

Restoration of heat exchanger and chiller functionality, with interventions on damaged or worn components, including replacement of seals, pipes, and fans.

Internal and external cleaning services to remove deposits, scaling, or contaminants that may impair performance.

Testing and Validation.

We also support other brands; if they are not listed, please feel free to contact us.

Heat exchanger and chiller, repair Flow:

- Diagnostic and Troubleshooting:
Our experts use advanced diagnostic tools to identify and troubleshoot issues quickly.

- Component Replacement:
We replace faulty components with high-quality parts to restore your chiller to optimal performance.

- Preventive Maintenance:
Regular maintenance to prevent future breakdowns and ensure efficient operation.

- Inspection and Cleaning:
Thorough inspection and cleaning to remove fouling and scale build-up, improving heat transfer efficiency.

- Tube and Shell Repairs:
Repair or replacement of damaged tubes and shells to restore functionality.

- Re-Tubing and Welding:
Skilled re-tubing and welding services to extend the lifespan of your heat exchanger.

Informations

Service Center

CVD / EPI - Amat / Novellus

Motor Robot and Drive Head Motors

Repair/Refurbishment and Test on Tool:
PCB boards P5000, Centura and Producer

Repair/Refurbishment Capabilities:

Solutions for CMP Obsolescence

Parts and solutions for CMP Polishers

services on Endura equipment

Parts and solutions for PVD Endura

ISO Valves Cylinders & Actuators

100% Compleate Refurbish Service

Comprehensive Valve Testing

Testing Phase: + 100 Cycles Up/Down

Robots and Wafer Handling

Advanced Test Bench with 6 Hours Run

Repair Flow Robot: Precision Restoration for Optimal Performance

Motor Robot and Core Drivers

Motor Robot, Spin and Drive Head Motors

Power Supply and RF Match

Semitool Raider Series

FACILITY: Turbo Pump Service

Vacuum Test and Perfect Restoration

FACILITY: Heat Exchanger and Chiller

Heat exchanger and chiller, repair Flow:

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Statement

core business

CONTACT US

Informations

CVD / EPI - Amat / Novellus

Motor Robot and Drive Head Motors

Repair/Refurbishment and Test on Tool:PCB boards P5000, Centura and Producer

Repair/Refurbishment Capabilities:

Solutions for CMP Obsolescence

Parts and solutions for CMP Polishers

services on Endura equipment

Parts and solutions for PVD Endura

ISO Valves Cylinders & Actuators

100% Compleate Refurbish Service

Comprehensive Valve Testing

Testing Phase: + 100 Cycles Up/Down

Robots and Wafer Handling

Advanced Test Bench with 6 Hours Run

Repair Flow Robot: Precision Restoration for Optimal Performance

Motor Robot and Core Drivers

Motor Robot, Spin and Drive Head Motors

Power Supply and RF Match

Semitool Raider Series

FACILITY: Turbo Pump Service

Vacuum Test and Perfect Restoration

FACILITY: Heat Exchanger and Chiller

Heat exchanger and chiller, repair Flow:

Request more Informations

Repair/Refurbishment and Test on Tool:
PCB boards P5000, Centura and Producer