DANTLE PLUS PLATFORM – Intuitive function of measurement Diagnose, analysis, verification, notification

SMG Technology Innovations supplies tools and products fully compatible for semiconductor equipment.

DANTLE PLUS PLATFORM

What is the DANTLE Patten Map Analyzer

This easy-to-apply system applies constant monitoring of each robot motor, always checking its correct operation, increasing manufacturing efficiency, reduced cost, and maximized facility maintenance efficiency.

- Real-time monitored data calculation of measurement value compared with the normal value in accordance with a lifetime of a facility for equipment status check in seconds and minutes.

DANTLE Patten Map Analyzer - full system

DANTLE Patten Map Analyzer - Key Features:

- Sensor's normal value setting in accordance with the equipment's life cycle, normal value and measurement value comparison by the real-time data monitoring.
- Calculation of normal value and standard deviation value in seconds and minutes
- Displayed as a graph of the probability distribution function of the measurement data including standard values
- Alert when the standard value is out of the standard deviation range

Our system designed and developed to provide intuitive user interface. Anyone can directly access/comprehend diagnosed data(symptom) and analyzed result(data) for maintenance plan or preventive maintenance.

DANTLE Patten Map Analyzer

DANTLE Patten Map Analyzer - GUI shows diagnose data for one cycle of robot operation.

What is the DANTLE Patten Map GUI

Count	Description	Remark
1	Wafer display color change based on process status	IDLE : YELLOW RUN : GREEN ALARM : RED
2	Displaying operation of each axis by color	IDLE : White RUN : GREEN ALARM : RED
3	Real-time vibration value	Vibration sensor
4	Real-time current value for axis	LodiaTM DAQ
5	Change setting value	-
6	Real-time system function	-

What is the DANTLE Patten Map Export Menu

Using Export menu on S/W,working trend perhour/each axis functional status/vibration data during operation can be measured.

Count	Description	Remark
1	Select data(period)	All/yesterday/today/last month
2	select .csv file
3	Displaying operating axis(each axis)	If robot operated with specific pattern map in each axis, Idle/moving can be identified.
4	Measure vibration data of the robot	Above picture shows status of normal condition during robot operation.

In case robot is in abnormal condition, system indicate axis data. Pop-up will provide clear data to show which abnormal behavior occurred.

Installation reference

DFP 8761 12 INCH FULLY AUTOMATIC Girder / Polisher TOOL
Installation Location : Singapore - December 2019

◆ Terms and Conditions:
1. Delivery terms: 3~4 weeks after PO & product incoming date
2. Payment terms: T/T 30 days after delivery
3. Warranty: 6 month after installation date for repair
4. Validity: 2 years from quotation date

Informations

DANTLE PLUS PLATFORM – Intuitive function of measurement Diagnose, analysis, verification, notification